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| | TITANIUM SILICIDE Basic information |
| Product Name: | TITANIUM SILICIDE | | Synonyms: | TITANIUM SILICIDE;pentatitanium trisilicide;Titanium silicide, ti5si3;silicon:titanium;Cadmium Telluride (CdTe) Sputtering Targets | | CAS: | 12067-57-1 | | MF: | Si3Ti5 | | MW: | 323.59 | | EINECS: | 235-082-9 | | Product Categories: | | | Mol File: | 12067-57-1.mol |  |
| | TITANIUM SILICIDE Chemical Properties |
| Melting point | 2130°C | | density | 4.3 g/cm3 | | form | -325 Mesh Powder | | Resistivity | 55 (ρ/μΩ.cm) | | Water Solubility | Soluble in hydrofluoric acid. Insoluble in water. | | Crystal Structure | Hexagonal | | EPA Substance Registry System | Titanium silicide (Ti5Si3) (12067-57-1) |
| RIDADR | UN3178 | | TSCA | Yes | | HazardClass | 4.1 | | PackingGroup | III |
| Provider | Language |
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ALFA
| English |
| | TITANIUM SILICIDE Usage And Synthesis |
| Chemical Properties | -325 mesh gray powder(s) [AES93] | | Uses | It is used as source, gate and drain contacts and local interconnections in CMOS integrated circuits. it is used in the C54 phase. |
| | TITANIUM SILICIDE Preparation Products And Raw materials |
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