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4419-47-0 Basic information More..
Product Name:TETRAKIS(DIETHYLAMINO)TITANIUM
Synonyms:TDEAT;TETRAKIS (DIETHYLAMIDO) TITANIUM;TETRAKIS(DIETHYLAMINO)TITANIUM;TETRAKIS DIETHYL AMINO TITANIUM (IV);TITANIUM (IV) DIETHYLAMIDE;TITANIUM TETRAKIS(DIETHYLAMIDE);Titanium, tetrakis(diethylamino)-;TETRAKIS(DIETHYLAMINO)TITANIUM, 99.999%
CAS:4419-47-0
MF:C16H40N4Ti
MW:336.38
EINECS:
Mol File:4419-47-0.mol
4419-47-0

Use

Tetrakis (diethylamino) titanium is useful Ti-source precusor. Tetrakis (diethylamino) titanium is useful in TiN film deposition using the atomic layer deposition method1,2. It is also a useful compound during the process of etching a layer of diamond like carbon.

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